Configuration

Version

UHR

Resolution

Point image

0.17nm

Lattice image

0.14nm

Accelerating voltage

100, 150, 200, 250, 300KV

Spot size

TEM mode

200 ~ 20nm (5)

EDS/NBD/CBD mode

25 ~ 1.0nm (5)

CBDE

Convergent angle

15 ~ 20mrd more

Acceptance anlge

Max. 20°

Magnification (Steps)

Low MAG mode

50 ~ 10,000X (20)

MAG mode

4,000 ~ 1,500,000(27)

SA MAG ode

10,000 ~ 1,000,000(21)

Camera length (Steps)

SA DIFF mode

120 ~ 3,000nm(15)

Specimen chamber

Specimen tilt angle

+/-20°