Energy Materials and Electron Microscopy Group

Facility

Facility

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  1. Vacuum Oven

  2. Transmission electron microscope (TEM)

  3. Single tilt Holder (JEOL)

  4. RTA (Rapid Thermal Annealing)

  5. Precision Ion Milling System Ⅱ

  6. Plasma cleaner

  7. Nanofactory Holder

  8. Liquid Holder (Protochips)

  9. Heating Holder (Protochips)

  10. Glove box

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